FACLITY REQUIREMENT |
Power | 220V, 2kW, 10A, 60Hz/50Hz |
---|---|---|
Air Supply | 90PSI (0.6MPa) | |
System Dimension (W x D x H) | 800 x 1250 x 1450 | |
System Weight | 400kg | |
Standard Complicnce | KS Standards | |
MOTION SYSTEM |
Positioning Accuracy | Y± 20μm Z± 10μm |
Y, Z Repeatability | Y± 10μm Z± 10μm | |
Y Max Speed | 500mm/s | |
Acceleration | 0.5G | |
Drive System | Step Motor | |
BOARD HANDLING |
Conveyor Type | Belt |
Tool Payload Capacity | 3kg | |
Minimum Board/Carrier Width | 40mm | |
Maximum Board/Carrier Width | 350mm | |
Minimum Board/Carrier Length | 50mm | |
Maximum Board/Carrier Length | 350mm | |
Operating System | Windows 7 | |
Board Thockness Range | 0.5~6mm | |
Communication Protocol | SMEMA | |
PLASMA HEAD |
Plasma Area(D x W) | 350 - 350mm |
FACLITY REQUIREMENT |
Power | 1000W at 50kHz |
---|---|---|
Primary Gas | Air or Argon | |
Process Gases | O2, N2, H2 | |
Operating Pressure Range | 30 - 90psg(0.2 - 0.6Mpa) |